DocumentCode
1384997
Title
On the calibration of multicomponent microforce sensors
Author
Jin, Wenlin ; Mote, C.D., Jr.
Author_Institution
Sch. of Mech. & Production Eng., Nanyang Technol. Univ., Singapore
Volume
7
Issue
2
fYear
1998
fDate
6/1/1998 12:00:00 AM
Firstpage
156
Lastpage
163
Abstract
A calibration method for multicomponent microforce sensors using Lorentz forces is proposed. The method permits generation of six force and moment components in three orthogonal directions on two-dimensional (2-D) structures that can be fabricated through existing silicon micromachining technology. Two multicomponent microforce sensor and calibration devices were developed and tested to verify the method
Keywords
calibration; force measurement; micromachining; microsensors; 2D structures; Lorentz forces; calibration; micromachining technology; multicomponent microforce sensors; orthogonal directions; Calibration; Chemical sensors; Conductors; Fabrication; Force control; Force measurement; Force sensors; Mechanical sensors; Silicon; Two dimensional displays;
fLanguage
English
Journal_Title
Microelectromechanical Systems, Journal of
Publisher
ieee
ISSN
1057-7157
Type
jour
DOI
10.1109/84.679338
Filename
679338
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