Fully integrated magnetically actuated micromachined relays

Author

Taylor, William P. ; Brand, Oliver ; Allen, Mark G.

Author_Institution

Teledyne Relays, Hawthorne, CA, USA

Volume

7

Issue

2

fYear

1998

fDate

6/1/1998 12:00:00 AM

Firstpage

181

Lastpage

191

Abstract

A fully integrated magnetically actuated micromachined relay has been successfully fabricated and tested. This particular device uses a single-layer coil to actuate a movable upper magnetically responsive platform. The minimum current for actuation was 180 mA, resulting in an actuation power of 33 mW. Devices have been tested which can make and break 1.2 A of current through the relay contacts when the relay is electromagnetically switched. Operational lifetimes in excess of 850000 operations have been observed. Contact resistances as low as 22.4 mΩ have been observed under electromagnetic actuation. Magnetic and structural finite-element (FE) simulations have been performed using ANSYS to calculate both the actuation and contact forces

Keywords

contact resistance; electromagnetic devices; finite element analysis; life testing; microactuators; micromachining; micromechanical devices; relays; 1.2 A; 180 mA; 22.4 mohm; 33 mW; ANSYS; actuation forces; contact forces; contact resistances; electromagnetic actuation; finite-element simulations; fully integrated micromachined relays; magnetic FE simulations; magnetically actuated micromachined relays; microrelays; movable upper magnetically responsive platform; single-layer coil; structural FE simulations; Coils; Contact resistance; Electrostatics; Fabrication; Magnetic devices; Microrelays; Relays; Switches; Testing; Voltage;

fLanguage

English

Journal_Title

Microelectromechanical Systems, Journal of

Publisher

ieee

ISSN

1057-7157

Type

jour

DOI

10.1109/84.679353

Filename

679353