Title :
Multistator LIGA-fabricated electrostatic wobble motors with integrated synchronous control
Author :
Samper, V.D. ; Sangster, A.J. ; Reuben, R.L. ; Wallrabe, U.
Author_Institution :
Inst. of Micro-Electron., Singapore
fDate :
6/1/1998 12:00:00 AM
Abstract :
A novel design of an electrostatic wobble motor is presented, which incorporates multiple concentric rotor-stator surface pairs to increase the space-usage efficiency and a segmented bearing for the implementation of synchronous control. The device has been successfully fabricated using the Lithographie, Galvanoformung, Abformung (LIGA) technique. The finite-element method is used to predict the available output torque, and the potential for extracting the useful output from the device is assessed
Keywords :
X-ray lithography; electroforming; electrostatic devices; finite element analysis; machine control; micromotors; stators; LIGA fabrication; finite element method; integrated synchronous control; multiple concentric rotor-stator surface pair; multistator electrostatic wobble motor; output torque; segmented bearing; space usage efficiency; Actuators; Catheters; Electrostatics; Fabrication; Friction; Microactuators; Micromotors; Minimally invasive surgery; Rotors; Synchronous motors;
Journal_Title :
Microelectromechanical Systems, Journal of
