DocumentCode
1385073
Title
An integrated liquid mixer/valve
Author
Voldman, Joel ; Gray, Martha L. ; Schmidt, Martin A.
Author_Institution
Dept. of Electr. Eng. & Comput. Sci., MIT, Cambridge, MA, USA
Volume
9
Issue
3
fYear
2000
Firstpage
295
Lastpage
302
Abstract
We present an integrated liquid mixer/valve to be used for sample preparation for bioscience analysis systems. The mixer/valve is a glass-silicon bonded structure with a wafer-bonded cantilever-plate flapper valve and deep reactive-ion etched ports. It is passively pressure actuated and is distinguished by the fact that it can perform both a mixing and valving function simultaneously to mix two liquids noncontinuously. We present the design and fabrication of the mixer/valve and show that it successfully performs both its valving and mixing functions, including the discontinuous mixing of two liquids. We propose a method for characterizing mixing in this device using fluorescence microscopy and the pH dependence of fluorescein fluorescence. This method aims to allow one to extract the mixing length from a quantifiable observable. We present modeling and results of mixing length measurements using this method.
Keywords
biological specimen preparation; fluorescence; microfluidics; micromachining; microvalves; mixing; wafer bonding; Si; bioscience analysis systems; deep reactive-ion etched ports; discontinuous mixing; fluorescence microscopy; integrated liquid mixer/valve; mixing length; pH dependence; passively pressure actuated device; sample preparation; wafer-bonded cantilever-plate flapper valve; Biological system modeling; Chaos; Etching; Fabrication; Fluorescence; Laboratories; Liquids; Microscopy; Valves; Wafer bonding;
fLanguage
English
Journal_Title
Microelectromechanical Systems, Journal of
Publisher
ieee
ISSN
1057-7157
Type
jour
DOI
10.1109/84.870054
Filename
870054
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