• DocumentCode
    1385073
  • Title

    An integrated liquid mixer/valve

  • Author

    Voldman, Joel ; Gray, Martha L. ; Schmidt, Martin A.

  • Author_Institution
    Dept. of Electr. Eng. & Comput. Sci., MIT, Cambridge, MA, USA
  • Volume
    9
  • Issue
    3
  • fYear
    2000
  • Firstpage
    295
  • Lastpage
    302
  • Abstract
    We present an integrated liquid mixer/valve to be used for sample preparation for bioscience analysis systems. The mixer/valve is a glass-silicon bonded structure with a wafer-bonded cantilever-plate flapper valve and deep reactive-ion etched ports. It is passively pressure actuated and is distinguished by the fact that it can perform both a mixing and valving function simultaneously to mix two liquids noncontinuously. We present the design and fabrication of the mixer/valve and show that it successfully performs both its valving and mixing functions, including the discontinuous mixing of two liquids. We propose a method for characterizing mixing in this device using fluorescence microscopy and the pH dependence of fluorescein fluorescence. This method aims to allow one to extract the mixing length from a quantifiable observable. We present modeling and results of mixing length measurements using this method.
  • Keywords
    biological specimen preparation; fluorescence; microfluidics; micromachining; microvalves; mixing; wafer bonding; Si; bioscience analysis systems; deep reactive-ion etched ports; discontinuous mixing; fluorescence microscopy; integrated liquid mixer/valve; mixing length; pH dependence; passively pressure actuated device; sample preparation; wafer-bonded cantilever-plate flapper valve; Biological system modeling; Chaos; Etching; Fabrication; Fluorescence; Laboratories; Liquids; Microscopy; Valves; Wafer bonding;
  • fLanguage
    English
  • Journal_Title
    Microelectromechanical Systems, Journal of
  • Publisher
    ieee
  • ISSN
    1057-7157
  • Type

    jour

  • DOI
    10.1109/84.870054
  • Filename
    870054