DocumentCode :
1385075
Title :
Fabrication of three-dimensional microstructures by electrochemically welding structures formed by microcontact printing on planar and curved substrates
Author :
Jackman, Rebecca J. ; Brittain, Scott T. ; Whitesides, George M.
Author_Institution :
Dept. of Chem. & Chem. Biol., Harvard Univ., Cambridge, MA, USA
Volume :
7
Issue :
2
fYear :
1998
fDate :
6/1/1998 12:00:00 AM
Firstpage :
261
Lastpage :
266
Abstract :
This paper describes two convenient techniques for the fabrication of three-dimensional (3-D) structures with micron-sized features. The methods use microcontact printing (μCP) to define patterns with feature sizes as small as 20 μm both on planar substrates and on cylinders (diameter ~2 mm). Electrodeposition serves as a micron-scale tool for metal deposition and welding that transforms these patterned surfaces and cylinders into metallic complex 3-D microstructures (e.g., tetrahedra). Final tetrahedra (~2-cm sides) have feature sizes as small as 50 μm
Keywords :
electric welding; electrodeposition; micromachining; printing; curved substrate; cylinder; electrochemical welding; electrodeposition; fabrication; metallic three-dimensional microstructure; microcontact printing; patterned surface; planar substrate; tetrahedra; Chemical lasers; Crystalline materials; Fabrication; Micromachining; Micromechanical devices; Microstructure; Resists; Silicon; Soft lithography; Welding;
fLanguage :
English
Journal_Title :
Microelectromechanical Systems, Journal of
Publisher :
ieee
ISSN :
1057-7157
Type :
jour
DOI :
10.1109/84.679396
Filename :
679396
Link To Document :
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