• DocumentCode
    1385333
  • Title

    Optical waveguides in SIMOX structures

  • Author

    Weiss, B.L. ; Reed, G.T. ; Toh, S.K. ; Soref, R.A. ; Namavar, F.

  • Author_Institution
    Dept. of Electron. & Electr. Eng, Surrey Univ., Guildford, UK
  • Volume
    3
  • Issue
    1
  • fYear
    1991
  • Firstpage
    19
  • Lastpage
    21
  • Abstract
    Propagation characteristics determined experimentally and theoretically for planar optical waveguides formed in separation by implantation of oxygen (SIMOX) structures are discussed. All samples were found to support both TE and TM modes at both 1.15 mu m and 1.523 mu m with a lowest propagation loss of 8 dB/cm. This loss was measured at a wavelength of 1.15 mu m for the TE/sub 0/ mode of a planar waveguide with a 2.0- mu m-thick Si guiding layer.
  • Keywords
    integrated optics; optical losses; optical waveguides; 1.15 micron; 1.523 micron; 2 micron; O/sub 2/; SIMOX structures; Si guiding layer; TE modes; TM modes; planar optical waveguides; propagation loss; separation by implantation of oxygen; Loss measurement; Optical losses; Optical planar waveguides; Optical propagation; Optical waveguide theory; Optical waveguides; Planar waveguides; Propagation losses; Wavelength measurement;
  • fLanguage
    English
  • Journal_Title
    Photonics Technology Letters, IEEE
  • Publisher
    ieee
  • ISSN
    1041-1135
  • Type

    jour

  • DOI
    10.1109/68.68035
  • Filename
    68035
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1385333