Title :
Optical waveguides in SIMOX structures
Author :
Weiss, B.L. ; Reed, G.T. ; Toh, S.K. ; Soref, R.A. ; Namavar, F.
Author_Institution :
Dept. of Electron. & Electr. Eng, Surrey Univ., Guildford, UK
Abstract :
Propagation characteristics determined experimentally and theoretically for planar optical waveguides formed in separation by implantation of oxygen (SIMOX) structures are discussed. All samples were found to support both TE and TM modes at both 1.15 mu m and 1.523 mu m with a lowest propagation loss of 8 dB/cm. This loss was measured at a wavelength of 1.15 mu m for the TE/sub 0/ mode of a planar waveguide with a 2.0- mu m-thick Si guiding layer.
Keywords :
integrated optics; optical losses; optical waveguides; 1.15 micron; 1.523 micron; 2 micron; O/sub 2/; SIMOX structures; Si guiding layer; TE modes; TM modes; planar optical waveguides; propagation loss; separation by implantation of oxygen; Loss measurement; Optical losses; Optical planar waveguides; Optical propagation; Optical waveguide theory; Optical waveguides; Planar waveguides; Propagation losses; Wavelength measurement;
Journal_Title :
Photonics Technology Letters, IEEE
