Title :
Hetero-amorphous Fe-Co-B-C soft magnetic thin films with uniaxial magnetic anisotropy and large magnetostriction
Author :
Tomita, Hiroshi ; Inoue, Tetsuo ; Mizoguchi, Tetsuhiko
Author_Institution :
Mater. & Devices Dev. Center, Toshiba Corp., Kawasaki, Japan
fDate :
9/1/1996 12:00:00 AM
Abstract :
Hetero-amorphous (Fe0.75Co0.25)1-x(B1-yC y)x films have been obtained by RF magnetron sputtering. Magnetic properties strongly depended on the hetero-amorphous substructure of the films. The film with a fine substructure less than 10 nm in mean diameter exhibited low coercive force of 40 A/m along the hard axis, large spontaneous magnetization of 1.6 T, and in-plane anisotropy field of 1.2 kA/m induced by field-annealing although the film had a large magnetostriction constant of 39×10-6
Keywords :
amorphous magnetic materials; boron alloys; cobalt alloys; coercive force; ferromagnetic materials; iron alloys; magnetic anisotropy; magnetic annealing; magnetostriction; soft magnetic materials; spontaneous magnetisation; sputtered coatings; (Fe0.75Co0.25)1-x(B1-y Cy)x; 10 nm; Fe0.75Co0.25BC; RF magnetron sputtering; coercive force; field-annealing; hetero-amorphous substructure; magnetostriction; soft magnetic thin films; spontaneous magnetization; uniaxial magnetic anisotropy; Coercive force; Iron; Magnetic anisotropy; Magnetic films; Magnetic properties; Magnetostriction; Perpendicular magnetic anisotropy; Radio frequency; Soft magnetic materials; Sputtering;
Journal_Title :
Magnetics, IEEE Transactions on
