Synthesis of fault-tolerant supervisor for automated manufacturing systems: a case study on photolithographic process

Author

Cho, Kwang-Hyun ; Lim, Jong-Tae

Author_Institution

Dept. of Electr. Eng., Korea Adv. Inst. of Sci. & Technol., Taejon, South Korea

Volume

14

Issue

2

fYear

1998

fDate

4/1/1998 12:00:00 AM

Firstpage

348

Lastpage

351

Abstract

A discrete event dynamic system (DEDS) approach is utilized to improve the reliability of a system from the fault-tolerance viewpoint. We propose a systematic way to classify faults and failures quantitatively and to find tolerable fault event sequences embedded in DEDSs. After this, the synthesis of a fault-tolerant supervisory control system is investigated. A case study of a photolithographic process in a semiconductor manufacturing system is provided to illustrate these techniques

Keywords

control system synthesis; discrete event systems; integrated circuit manufacture; photolithography; process control; reliability; automated manufacturing systems; discrete event dynamic system; failures; fault-tolerant supervisor; faults; photolithographic process; reliability; semiconductor manufacturing system; tolerable fault event sequences; Automatic control; Classification algorithms; Computer aided software engineering; Control system synthesis; Electric breakdown; Failure analysis; Fault tolerance; Fault tolerant systems; Manufacturing systems; Supervisory control;

fLanguage

English

Journal_Title

Robotics and Automation, IEEE Transactions on

Publisher

ieee

ISSN

1042-296X

Type

jour

DOI

10.1109/70.681255

Filename

681255