Title :
Synthesis of fault-tolerant supervisor for automated manufacturing systems: a case study on photolithographic process
Author :
Cho, Kwang-Hyun ; Lim, Jong-Tae
Author_Institution :
Dept. of Electr. Eng., Korea Adv. Inst. of Sci. & Technol., Taejon, South Korea
fDate :
4/1/1998 12:00:00 AM
Abstract :
A discrete event dynamic system (DEDS) approach is utilized to improve the reliability of a system from the fault-tolerance viewpoint. We propose a systematic way to classify faults and failures quantitatively and to find tolerable fault event sequences embedded in DEDSs. After this, the synthesis of a fault-tolerant supervisory control system is investigated. A case study of a photolithographic process in a semiconductor manufacturing system is provided to illustrate these techniques
Keywords :
control system synthesis; discrete event systems; integrated circuit manufacture; photolithography; process control; reliability; automated manufacturing systems; discrete event dynamic system; failures; fault-tolerant supervisor; faults; photolithographic process; reliability; semiconductor manufacturing system; tolerable fault event sequences; Automatic control; Classification algorithms; Computer aided software engineering; Control system synthesis; Electric breakdown; Failure analysis; Fault tolerance; Fault tolerant systems; Manufacturing systems; Supervisory control;
Journal_Title :
Robotics and Automation, IEEE Transactions on
