Title :
Love-wave biosensors using cross-linked polymer waveguides on LiTaO3 substrates
Author :
Bender, Florian ; Cernosek, R.W. ; Josse, Fabien
Author_Institution :
Dept. of Microsensor R&D, Sandia Nat. Labs., Albuquerque, NM, USA
Abstract :
The design and performance of Love-wave sensors using crosslinked poly(methyl methacrylate) waveguides of thicknesses of 0.3 to 3.21 μm on LiTaO3 substrates are described. It is found that this layer-substrate combination provides sufficient waveguidance and electrical isolation of the interdigital transducers from the liquid environment to achieve low acoustic loss and distortion. In biosensing experiments, mass sensitivity up to 1420 Hz(ng/mm2) is demonstrated.
Keywords :
biosensors; 0.3 to 3.2 mum; LiTaO3; LiTaO3 substrates; Love-wave biosensors; acoustic loss; cross-linked polymer waveguides; electrical isolation; interdigital transducers; mass sensitivity; poly(methyl methacrylate);
Journal_Title :
Electronics Letters
