• DocumentCode
    1386698
  • Title

    Fabrication of 2×2 tapered multimode interference coupler

  • Author

    Wei, Hongzhen ; Yu, Jinzhong ; Liu, Zhongli ; Zhang, Xioafeng ; Shi, Wei ; Fang, Changshui

  • Author_Institution
    Inst. of Semicond., Acad. Sinica, Beijing, China
  • Volume
    36
  • Issue
    19
  • fYear
    2000
  • fDate
    9/14/2000 12:00:00 AM
  • Firstpage
    1618
  • Lastpage
    1619
  • Abstract
    The authors demonstrate a 3 dB 2×2 parabolically tapered multimode interference (MMI) coupler with a large cross-section and space between the different ports using silicon-on-insulator technology. The device exhibits a uniformity of <0.8 dB and can be used in the realisation of an MMI-based optical switch with a high extinction ratio
  • Keywords
    light interference; optical couplers; optical design techniques; optical fabrication; optical planar waveguides; optical switches; rib waveguides; silicon-on-insulator; 2×2 tapered multimode interference coupler; MMI-based optical switch; Si-SiO2; Si-on-insulator technology; extinction ratio; fabrication; multimode interference-based optical switch; parabolically tapered multimode interference coupler; uniformity;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:20001166
  • Filename
    871149