Low-loss substrate-removed (SURE) optical waveguides in GaAs-AlGaAs epitaxial layers embedded in organic polymers

Author

Sakamoto, S.R. ; Ozturk, C. ; Young Tae Byun ; Ko, J. ; Dagli, N.

Author_Institution

Dept. of Electr. & Comput. Eng., California Univ., Santa Barbara, CA, USA

Volume

10

Issue

7

fYear

1998

fDate

7/1/1998 12:00:00 AM

Firstpage

985

Lastpage

987

Abstract

Low-loss single-mode semiconductor rib optical waveguides fabricated in GaAs-AlGaAs epitaxial layers are removed from GaAs substrates and bonded to transfer substrates using a benzocyclobutene organic polymer. Optical quality facets were obtained by cleaving through the transfer substrate. An average propagation loss of 0.39 and 0.48 dB/cm at 1.55 μm wavelength for TE and TM polarizations, respectively, were measured. This was on average 0.05 dB/cm greater than control guides fabricated in GaAs-AlGaAs epilayers on GaAs substrates with air as the top cladding. This demonstrates the feasibility of a process enabling semiconductor polymer integration and processing both sides of an epitaxial layer.

Keywords

III-V semiconductors; adhesion; aluminium compounds; gallium arsenide; integrated optics; optical fabrication; optical losses; optical waveguides; rib waveguides; semiconductor epitaxial layers; semiconductor technology; substrates; 1.55 mum; GaAs; GaAs substrates; GaAs-AlGaAs; GaAs-AlGaAs epitaxial layers; SURE optical waveguides; TE polarizations; TM polarizations; average propagation loss; benzocyclobutene organic polymer bonding material; cleaving; low-loss single-mode semiconductor rib optical waveguide fabrication; low-loss substrate-removed optical waveguides; optical quality facets; organic polymers; semiconductor polymer integration; top cladding; transfer substrate; transfer substrates; Bonding; Epitaxial layers; Gallium arsenide; Optical polarization; Optical polymers; Optical waveguides; Propagation losses; Semiconductor waveguides; Substrates; Tellurium;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/68.681292

Filename

681292