Title :
Thick-film PZT-silicon micromechanical resonator
Author :
Beeby, S.P. ; White, N.M.
Author_Institution :
Dept. of Electron. & Comput. Sci., Southampton Univ., UK
fDate :
9/14/2000 12:00:00 AM
Abstract :
A micromechanical silicon beam resonator in which the vibrations are driven and detected by thick-film printed piezoelectric elements is presented. Standard micromachining and thick-film processes have been successfully combined to fabricate the device. The resonator, 2 mm long and 0.52 mm wide has a fundamental mode in air at 56.5 kHz with a Q-factor of 70
Keywords :
elemental semiconductors; lead compounds; micromachining; micromechanical resonators; piezoelectric devices; silicon; thick films; 0.52 mm; 2 mm; 56.5 kHz; PZT-Si; PbZrO3TiO3-Si; Q-factor; fundamental mode; micromachining; micromechanical resonator; thick-film printed piezoelectric elements;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:20001139
