Title :
Magnetic properties of Fe(N)/NiFe(N) sputtered on sloping surfaces
Author :
Jones, R.E., Jr. ; Spector, C.J. ; Williams, J.L. ; Lin, C.J.
Author_Institution :
Carnegie Mellon Univ., Pittsburgh, PA, USA
fDate :
9/1/1996 12:00:00 AM
Abstract :
The magnetic properties of sputtered iron-based films can be significantly different when deposited on sloping surfaces. For example, anisotropy fields, Hk, and easy axis coercivities, Hce , of Fe(N)/NiFe(N) films in this study were as much as two orders of magnitude higher on 60° tilted surfaces than on flat surfaces. The use of high substrate bias during deposition effectively lessened increases of Hk and Hce. These parameters were largely independent of the nitrogen content of the films, implying the observed increases were not strongly dependent on magnetostriction. The large Hk and the Hce values are believed to be caused by a shape anisotropy associated with angle-of-incidence deposition and film crystallite morphology
Keywords :
Permalloy; coercive force; crystal morphology; ferromagnetic materials; iron compounds; magnetic anisotropy; magnetic multilayers; soft magnetic materials; sputtered coatings; 60° tilted surfaces; Fe(N)/NiFe(N); FeN-FeNiN; angle-of-incidence deposition; anisotropy fields; deposition; easy axis coercivities; film crystallite morphology; high substrate bias; magnetic properties; magnetostriction; shape anisotropy; sloping surface sputtering; Anisotropic magnetoresistance; Coercive force; Crystallization; Magnetic films; Magnetic properties; Magnetostriction; Nitrogen; Shape; Substrates; Surface morphology;
Journal_Title :
Magnetics, IEEE Transactions on
