Proposal for a Micromachined Dynamically Tuned Gyroscope, Based on a Contactless Suspension

Author

Poletkin, Kirill V. ; Chernomorsky, Alexsandr I. ; Shearwood, Christopher

Author_Institution

Sch. of Mech. & Aerosp. Eng., Nanyang Technol. Univ., Singapore, Singapore

Volume

12

Issue

6

fYear

2012

fDate

6/1/2012 12:00:00 AM

Firstpage

2164

Lastpage

2171

Abstract

In this paper, the operating principle of a micromachined, dynamically tuned gyroscope, based on a contactless suspension is discussed and its mathematical model is derived. Dynamical analysis based on this mathematical model for the case in which the contactless suspension provides “hard” electrical springs is conducted. The analysis shows that such a gyroscope can be created in principal and provides a value for the gyroscope gain to measuring angular rate which is several orders of magnitude greater in comparison with existed prototypes of the micromachined gyroscope based on a contactless suspension.

Keywords

gyroscopes; micromachining; microsensors; springs (mechanical); suspensions (mechanical components); angular rate measurement; contactless suspension; dynamical analysis; electrical springs; mathematical model; micromachined dynamically tuned gyroscope; Equations; Gyroscopes; Mathematical model; Prototypes; Rotors; Springs; Zirconium; Gyroscope; inertial sensors; microelectromechanical systems; rotor tuning condition;

fLanguage

English

Journal_Title

Sensors Journal, IEEE

Publisher

ieee

ISSN

1530-437X

Type

jour

DOI

10.1109/JSEN.2011.2178020

Filename

6094157