DocumentCode :
1388150
Title :
An introduction to microelectromechanical systems engineering [Book Review]
Author :
Shea, John
Volume :
16
Issue :
5
fYear :
2000
Firstpage :
51
Lastpage :
52
Keywords :
Book reviews; Coatings; Microelectromechanical systems; Micromechanical devices; Optical films; Optical materials; Plasma materials processing; Polymer films; Power generation economics; Systems engineering and theory;
fLanguage :
English
Journal_Title :
Electrical Insulation Magazine, IEEE
Publisher :
ieee
ISSN :
0883-7554
Type :
jour
DOI :
10.1109/MEI.2000.871421
Filename :
871421
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1388150
