DocumentCode
1388150
Title
An introduction to microelectromechanical systems engineering [Book Review]
Author
Shea, John
Volume
16
Issue
5
fYear
2000
Firstpage
51
Lastpage
52
Keywords
Book reviews; Coatings; Microelectromechanical systems; Micromechanical devices; Optical films; Optical materials; Plasma materials processing; Polymer films; Power generation economics; Systems engineering and theory;
fLanguage
English
Journal_Title
Electrical Insulation Magazine, IEEE
Publisher
ieee
ISSN
0883-7554
Type
jour
DOI
10.1109/MEI.2000.871421
Filename
871421
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