Piezomagnetic tuning of a micromachined resonator

We have been developing a range of high performance thin film and multilayer piezomagnetic materials for possible integration in to microelectromechanical systems. In this paper we demonstrate that the resonant frequency of a micromachined resonant beam may be tuned using the ΔE effect associated with such piezomagnetic materials. This demonstration of principle leads directly to methods of addressing inherent problems such as thermal drift or ageing in microsystems. We also present a discussion of the benefits to be derived from the use of piezomagnetic materials in such applications