Title :
High-coercivity CoPt alloy films grown by sputtering
Author :
Hu, J.-P. ; Lin, P.
Author_Institution :
Inst. of Mater. Sci. & Eng., Nat. Chiao Tung Univ., Hsinchu, Taiwan
fDate :
9/1/1996 12:00:00 AM
Abstract :
CoxPt1-x alloy films (x=0.2~0.4) were prepared by rf sputtering at substrate temperatures 150~300°C without a Pt underlayer and post annealing. The magnetic properties of the films showed strong dependence on the composition and substrate temperature. High coercivity (~191 KA/m) and saturated remanence were achieved at conditions x=0.25 and 200°C. In contrast to the previous observations, the high perpendicular magnetic anisotropy, in the current case, appeared not associated with the good CoPt (111) texture. An interpretation based on minor composition modulation in the films was proposed
Keywords :
Kerr magneto-optical effect; cobalt alloys; coercive force; ferromagnetic materials; magnetic thin films; permanent magnets; perpendicular magnetic anisotropy; platinum alloys; remanence; sputtered coatings; 150 to 300 degC; 200 degC; CoxPt1-x alloy films; CoPt; Kerr hysteresis loop; composition; high perpendicular magnetic anisotropy; high-coercivity CoPt alloy films; magnetic properties; minor composition modulation; rf sputtering; saturated remanence; substrate temperature; substrate temperatures; Annealing; Cobalt alloys; Coercive force; Magnetic films; Magnetic properties; Perpendicular magnetic anisotropy; Platinum alloys; Remanence; Sputtering; Temperature dependence;
Journal_Title :
Magnetics, IEEE Transactions on
