Title :
10 GHz range extremely low-loss surface acoustic wave filter
Author :
Odagawa, H. ; Yamanouchi, K.
Author_Institution :
Res. Inst. of Electr. Commun., Tohoku Univ., Sendai, Japan
fDate :
4/30/1998 12:00:00 AM
Abstract :
A low-loss 10 GHz range surface acoustic wave (SAW) filter is investigated. It is fabricated on 128° Y-X LiNbO3 using electron beam direct writing and a lift-off process (aluminium electrode width =95 nm, thickness =30 nm). Experimental results of the ladder type SAW filter show low loss characteristics. A minimum insertion loss of 3.4 dB in the 10 GHz range is obtained
Keywords :
electrodes; electron beam lithography; ladder filters; lithium compounds; surface acoustic wave filters; 10 GHz; 3.4 dB; 30 nm; 95 nm; LiNbO3; electrode width; electron beam direct writing; ladder type filter; lift-off process; low loss characteristics; minimum insertion loss; surface acoustic wave filter;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19980634
