DocumentCode
1391412
Title
Dark current optimisation for MOVPE grown 2.5 μm wavelength InGaAs photodetectors
Author
Hondt, M.D. ; Moerman, I. ; Demeester, P.
Author_Institution
Dept. of Inf. Technol., IMEC, Gent, Belgium
Volume
34
Issue
9
fYear
1998
fDate
4/30/1998 12:00:00 AM
Firstpage
910
Lastpage
912
Abstract
We have fabricated 2.5μmn InGaAs photodetectors, which exhibit state-of-the-art dark current densities (1O9A/cm2 at 150K, -1OmV). The major parameter was the doping level of the absorbing layer. Measuring the dark current against temperature allows us to separate it into three different contributions, Also, the spectral response of the photodetectors was discussed as a function of the absorbing layer´s doping level
Keywords
III-V semiconductors; dark conductivity; doping profiles; gallium arsenide; indium compounds; photodetectors; semiconductor epitaxial layers; semiconductor growth; vapour phase epitaxial growth; -10 mV; 150 K; 2.5 micrometre; III-V semiconductors; InGaAs; MOVPE; absorbing layer; dark current optimisation; doping level; photodetectors; spectral response;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19980560
Filename
682854
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