Title :
Polyimide/Ta/sub 2/O/sub 5//polyimide antiresonant reflecting optical waveguides
Author :
Chu, A.K. ; Chuang, M.J.
Author_Institution :
Inst. of Electro-Opt. Eng., Nat. Sun Yat-Sen Univ., Kaohsiung, Taiwan
Abstract :
A novel antiresonant reflecting optical waveguide (ARROW) fabricated using both the organic and dielectric thin film technologies is presented for the first time. The ARROW consisted of the fluorinated polyimide and tantalum pentoxide (Ta/sub 2/O/sub 5/) hybrid layers deposited on a Si substrate. For TE polarized light, the propagation loss of the waveguide as low as 0.8 dB/cm is obtained at 632.8 nm. The propagation loss for TM polarized light is 2.7 dB/cm. Some design considerations of the hybrid ARROW are also discussed in this work.
Keywords :
integrated optics; optical fabrication; optical losses; optical multilayers; optical polymers; 632.8 nm; ARROW; Si; Si substrate; TE polarized light; TM polarized light; Ta/sub 2/O/sub 5/; antiresonant reflecting optical waveguide; design considerations; dielectric thin film technologies; fluorinated polyimide; hybrid ARROW; integrated optics; polyimide/Ta/sub 2/O/sub 5//polyimide antiresonant reflecting optical waveguides; propagation loss; Optical films; Optical polarization; Optical refraction; Optical scattering; Optical sensors; Optical variables control; Optical waveguides; Polyimides; Polymers; Propagation losses;
Journal_Title :
Photonics Technology Letters, IEEE
