Title :
Predicting Cycle Time Distributions for Integrated Processing Workstations: An Aggregate Modeling Approach
Author :
Veeger, C.P.L. ; Etman, L.F.P. ; Lefeber, E. ; Adan, I.J.B.F. ; Van Herk, J. ; Rooda, J.E.
Author_Institution :
Syst. Eng. Group, Eindhoven Univ. of Technol., Eindhoven, Netherlands
fDate :
5/1/2011 12:00:00 AM
Abstract :
To predict cycle time distributions of integrated processing workstations, detailed simulation models are almost exclusively used; these models require considerable development and maintenance effort. As an alternative, we propose an aggregate model that is a lumped-parameter representation of the workstation. The aggregate model is a single server with a work-in-process dependent aggregate process time distribution and overtaking distribution. The lumped parameters are determined directly from arrival and departure events measured at the workstation. An extensive simulation study and an industry case demonstrate that the aggregate model can accurately predict the cycle time distribution of integrated processing workstations in semiconductor manufacturing.
Keywords :
lumped parameter networks; semiconductor device manufacture; work in progress; workstations; cycle time distributions; integrated processing workstations; overtaking distribution; semiconductor manufacturing; work-in-process dependent aggregate process time distribution; workstation lumped-parameter representation; Aggregates; Biological system modeling; Computational modeling; Predictive models; Throughput; Workstations; Cycle time distribution; discrete-event simulation; factory dynamics; manufacturing systems; performance evaluation; queueing;
Journal_Title :
Semiconductor Manufacturing, IEEE Transactions on
DOI :
10.1109/TSM.2010.2094630