Title :
Ellipsometric evaluation of shape of corrugations for DFB-LD
Author :
Okai, M. ; Tsuji, Satoshi ; Chinone, N.
Author_Institution :
Hitachi Ltd., Tokyo
fDate :
3/3/1988 12:00:00 AM
Abstract :
The shape of corrugations for a DFB-LD is evaluated using ellipsometry. This technique provides a nondestructive method of evaluating corrugation shape. The corrugation on the surface of an InP substrate is assumed to be a thin film. The thickness and refractive index of this virtual thin film, measured by ellipsometry, provide information on corrugation depth and shape, respectively. With this method, it is possible to distinguish corrugations which have the same diffraction efficiency but different shapes
Keywords :
distributed feedback lasers; ellipsometry; nondestructive testing; semiconductor junction lasers; DFB lasers; DFB-LD; InP substrate; corrugation depth; diffraction efficiency; ellipsometry; evaluating corrugation shape; nondestructive method; refractive index;
Journal_Title :
Electronics Letters
