DocumentCode
1394370
Title
Ellipsometric evaluation of shape of corrugations for DFB-LD
Author
Okai, M. ; Tsuji, Satoshi ; Chinone, N.
Author_Institution
Hitachi Ltd., Tokyo
Volume
24
Issue
5
fYear
1988
fDate
3/3/1988 12:00:00 AM
Firstpage
280
Lastpage
282
Abstract
The shape of corrugations for a DFB-LD is evaluated using ellipsometry. This technique provides a nondestructive method of evaluating corrugation shape. The corrugation on the surface of an InP substrate is assumed to be a thin film. The thickness and refractive index of this virtual thin film, measured by ellipsometry, provide information on corrugation depth and shape, respectively. With this method, it is possible to distinguish corrugations which have the same diffraction efficiency but different shapes
Keywords
distributed feedback lasers; ellipsometry; nondestructive testing; semiconductor junction lasers; DFB lasers; DFB-LD; InP substrate; corrugation depth; diffraction efficiency; ellipsometry; evaluating corrugation shape; nondestructive method; refractive index;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
Filename
5658
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