DocumentCode
1394763
Title
Simulation of multi-level radiation-induced charge trapping and thermally activated phenomena in SiO2
Author
Paillet, P. ; Touron, J.L. ; Leray, J.L. ; Cirba, C. ; Michez, A.
Author_Institution
CEA, Bruyeres-le-Chatel, France
Volume
45
Issue
3
fYear
1998
fDate
6/1/1998 12:00:00 AM
Firstpage
1379
Lastpage
1384
Abstract
Charge trapping on several energy levels and thermally activated detrapping phenomena in SiO2 have been determined by finite element simulation. The results obtained agree well with experimental charge detrapping measurements, and enable the simulation of post-irradiation effects in Si/SiO2 structures
Keywords
MIS devices; electron traps; elemental semiconductors; finite element analysis; radiation effects; silicon; silicon compounds; MOS devices; charge detrapping measurements; energy levels; finite element simulation; multi-level radiation-induced charge trapping; post-irradiation effects; thermally activated phenomena; Charge carrier processes; Current measurement; Differential equations; Electron mobility; Electron traps; Energy states; Finite element methods; Photonic band gap; Poisson equations; Spontaneous emission;
fLanguage
English
Journal_Title
Nuclear Science, IEEE Transactions on
Publisher
ieee
ISSN
0018-9499
Type
jour
DOI
10.1109/23.685210
Filename
685210
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