Title :
Solid state optical gyrometer integrated on silicon
Author :
Mottier, P. ; Pouteau, P.
Author_Institution :
Lab d´´Electron. et de Technol. de l´´Inf., CEA, Centre d´´Etudes Nucleaires de Grenoble, France
fDate :
11/6/1997 12:00:00 AM
Abstract :
The authors have demonstrated for the first time the feasibility of solid state optical gyrometers. They consist of a silica waveguide coil fully integrated on a silicon substrate and operating at 850 nm wavelength. A typical sensitivity of 1°/s-1 and a full linearity at least between -900 and 900°/s-1 have been obtained so far. Thus first results could open the way to further improvements in order to achieve low cost rotation sensors
Keywords :
angular measurement; elemental semiconductors; fibre optic sensors; gyroscopes; integrated optics; silicon; 850 nm; Si; linearity; rotation sensors; sensitivity; solid state optical gyrometers; waveguide coil;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19971319