K-band 3-bit low-loss distributed MEMS phase shifter

Author

Liu, Yu ; Borgioli, Andrea ; Nagra, Amit S. ; York, Robert A.

Author_Institution

Dept. of Electr. & Comput. Eng., California Univ., Santa Barbara, CA, USA

Volume

10

Issue

10

fYear

2000

fDate

10/1/2000 12:00:00 AM

Firstpage

415

Lastpage

417

Abstract

In this work, we present a 3-bit K-band distributed phase shifter circuit that employs microelectromechanical systems (MEMS) capacitive switches. The measured results demonstrate an average 1.7 dB insertion loss at 26 GHz with return loss better than -7 dB. Insertion phase shifts of all switching states are measured and show phase error less than 8.50 for all states. The low loss K-band 3-bit phase shifter demonstrated here can potentially be extended to more-bit-controlled phase shifter applications

Keywords

coplanar waveguide components; distributed parameter networks; losses; micromechanical devices; microwave phase shifters; microwave switches; -7 dB; 1.7 dB; 26 GHz; CPW transmission line; K-band; MEMS capacitive switches; SHF; distributed MEMS phase shifter; low-loss distributed phase shifter; microelectromechanical systems; Communication switching; Coplanar waveguides; Distributed parameter circuits; K-band; MIM capacitors; Micromechanical devices; Phase shifters; Power transmission lines; Switches; Switching circuits;

fLanguage

English

Journal_Title

Microwave and Guided Wave Letters, IEEE

Publisher

ieee

ISSN

1051-8207

Type

jour

DOI

10.1109/75.877230

Filename

877230