Reflection, coupling and absorption of plane waves incident on an integrated circuit

Author

Shlager, Kurt ; Preis, Douglas ; King, Ronold W.P.

Author_Institution

Dept. of Electr. Eng., Tufts Univ., Medford, MA, USA

Volume

30

Issue

4

fYear

1988

fDate

11/1/1988 12:00:00 AM

Firstpage

570

Lastpage

577

Abstract

Exact analytical expressions are given for the plane-wave complex reflection coefficient as a function of frequency at the air-dielectric interface of a three-layer model for an integrated circuit. Numerous curves are presented, exhibiting the nature of wave reflection from and power absorption by the integrated-circuit model. Expressions for those components of the electromagnetic field that can couple to the microcircuits also are given. Numerically computed results depend on both the angle of incidence and polarization of the incident plane wave as well as the electrical thickness and loss of the dielectric (silicon-substrate) layer

Keywords

electromagnetic induction; electromagnetic wave absorption; monolithic integrated circuits; semiconductor device models; EM induction; EM wave absorption; EM wave coupling; EM wave reflection; IC; Si; air-dielectric interface; angle of incidence; dielectric layer; dielectric loss; electrical thickness; electromagnetic field; frequency; incident plane wave; integrated circuit; microcircuits; plane-wave complex reflection coefficient; polarization; power absorption; three-layer model; Coupling circuits; Dielectric losses; Dielectric substrates; Electromagnetic fields; Electromagnetic reflection; Electromagnetic wave absorption; Electromagnetic wave polarization; Frequency; Integrated circuit modeling; Silicon;

fLanguage

English

Journal_Title

Electromagnetic Compatibility, IEEE Transactions on

Publisher

ieee

ISSN

0018-9375

Type

jour

DOI

10.1109/15.8773

Filename

8773