Simple confocal thickness gauge based on fibre-optic confocal sensor for non-contact measurement

A simple non-contact thickness measurement method based on a dual-confocal microscope has been developed and tested. A reference comparison method was adapted for calibration of the system. The high accuracy potential of the method was demonstrated by measuring the thickness of transparent samples and a non-transparent soft biological sample. Lensed-tip fibre-optic confocal sensors were tested for the method.