• DocumentCode
    1397045
  • Title

    Fabrication of poly(dimethylsiloxane) concave microlens arrays by selective wetting and replica moulding

  • Author

    Xi Ke ; Jing Zhang ; Haiyan Qiao ; Chunyan Xing ; Zhe Zhang ; Baoping Lu ; Wenshu Yang ; Jinhui Hao ; Bailin Zhang ; Jilin Tang

  • Author_Institution
    State Key Lab. of Electroanalytical Chem., Changchun Inst. of Appl. Chem., Changchun, China
  • Volume
    7
  • Issue
    11
  • fYear
    2012
  • fDate
    11/1/2012 12:00:00 AM
  • Firstpage
    1121
  • Lastpage
    1124
  • Abstract
    This Letter describes a novel approach in fabricating poly(dimethylsiloxane) (PDMS) concave microlens arrays (MLAs) by using a combination of microcontact printing (μCP), selective wetting/dewetting and replica moulding. μCP is used to generate a chemical pattern utilising hexadecanethiol (HDT) as an ink on gold substrate. When polyethylene glycol (PEG) is dip-coated on the chemical pattern, the PEG solution selectively dewets the HDT patterned regions and wets the remaining bare gold regions, resulting in the formation of a PEG dot array. Then, PDMS concave MLAs were fabricated by replica moulding of the PEG dot array. The fabricated microlenses have a diameter of 39.9 μm and a sag height of 2.9 μm as were revealed by a scanning electron microscope and atomic force microscopy. This method provides a simple and low-cost approach to prepare large-area PDMS concave MLAs, which has potential application in many optoelectronic devices.
  • Keywords
    atomic force microscopy; microlenses; optical fabrication; optical polymers; replica techniques; scanning electron microscopy; soft lithography; wetting; Au; PEG solution; atomic force microscopy; chemical pattern; dip-coating; gold substrate; hexadecanethiol; large-area PDMS concave MLA; low-cost approach; microcontact printing; optoelectronic devices; poly(dimethylsiloxane) concave microlens array fabrication; replica moulding; sag height; scanning electron microscope; selective wetting; size 2.9 mum; size 39.9 mum;
  • fLanguage
    English
  • Journal_Title
    Micro & Nano Letters, IET
  • Publisher
    iet
  • ISSN
    1750-0443
  • Type

    jour

  • DOI
    10.1049/mnl.2012.0663
  • Filename
    6409028