Fabrication of flexible microlens array through vapor-induced room temperature dewetting on plasma treated Parylene-C

Microlens arrays have been widely used as an essential component in many optical systems. The conventional fabrication techniques, such as ink-jet printing, photoresist thermal reflow, grayscale photolithography, and LIGA process have some drawbacks in aspects of process complexity and high fabrication cost. This paper presents a low-temperature, rapid and cost-effective method to successfully generate SU-8 microlens arrays on biocompatible Parylene-C surfaces. Vapor-induced SU-8 dewetting has been achieved on chemically modified Parylene-C surfaces that were selectively pre-treated with O₂ or SF₆ plasma. By this technique, the SU-8 droplets are self-organized onto desired positions to form a microlens array. This method is also suitable for production of microlens array on curved surfaces. The progress of dewetting has been studied by both experiment and simulation.