Title :
Increase of coercive force in sputtered hard disk
Author :
Tani, Noriaki ; Hashimoto, Masanori ; Ishikawa, Michio ; Ota, Yoshifumi ; Nakamura, Kyuzo ; Itoh, Akio
Author_Institution :
ULVAC Japan Ltd., Chiba, Japan
fDate :
7/1/1990 12:00:00 AM
Abstract :
A study was made on increasing the coercive force in CoNiCr/Cr sputtered hard-disk media. A higher coercive force could be obtained when the substrate temperature was higher than 150°C and a negative bias voltage was applied to the substrate during sputtering. With optimized conditions, a coercive force of more than 2300 Oe was obtained. The increase in the coercive force is thought to be due to the enhancement of isolation between magnetic particles by developing the segregation of Cr in the CoNiCr film
Keywords :
chromium; chromium alloys; cobalt alloys; coercive force; ferromagnetic properties of substances; hard discs; nickel alloys; sputtered coatings; 100 to 300 degC; CoNiCr-Cr; coercive force; magnetic particle isolation; negative bias voltage; segregation; sputtered hard-disk media; substrate temperature; Argon; Chromium; Coercive force; Hard disks; Land surface temperature; Magnetic films; Magnetic heads; Sputtering; Substrates; Voltage;
Journal_Title :
Magnetics, IEEE Transactions on
