• DocumentCode
    1399646
  • Title

    Fabrication of surface relief gratings on lithium niobate by combined UV laser and wet etching

  • Author

    Mailis, S. ; Ross, G.W. ; Reekie, L. ; Abernethy, J.A. ; Eason, R.W.

  • Author_Institution
    Optoelectron. Res. Centre, Southampton Univ., UK
  • Volume
    36
  • Issue
    21
  • fYear
    2000
  • fDate
    10/12/2000 12:00:00 AM
  • Firstpage
    1801
  • Lastpage
    1803
  • Abstract
    Surface relief gratings have been fabricated on pure and Ti indiffused lithium niobate samples of x-cut and z-cut crystallographic orientations by a simple two-step process, which combines optical (pulsed ultra-violet laser) and chemical etching
  • Keywords
    diffraction gratings; etching; laser beam etching; lithium compounds; optical fabrication; optical materials; optical waveguides; titanium; LiNbO3; LiNbO3:Ti; Ti indiffused LiNbO3 samples; UV laser etching; chemical etching; combined UV laser/wet etching; fabrication; optical laser etching; pulsed ultra-violet laser etching; surface relief gratings; two-step process; wet etching; x-cut crystallographic orientations; z-cut crystallographic orientations;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:20001262
  • Filename
    878645