Title :
Fabrication of surface relief gratings on lithium niobate by combined UV laser and wet etching
Author :
Mailis, S. ; Ross, G.W. ; Reekie, L. ; Abernethy, J.A. ; Eason, R.W.
Author_Institution :
Optoelectron. Res. Centre, Southampton Univ., UK
fDate :
10/12/2000 12:00:00 AM
Abstract :
Surface relief gratings have been fabricated on pure and Ti indiffused lithium niobate samples of x-cut and z-cut crystallographic orientations by a simple two-step process, which combines optical (pulsed ultra-violet laser) and chemical etching
Keywords :
diffraction gratings; etching; laser beam etching; lithium compounds; optical fabrication; optical materials; optical waveguides; titanium; LiNbO3; LiNbO3:Ti; Ti indiffused LiNbO3 samples; UV laser etching; chemical etching; combined UV laser/wet etching; fabrication; optical laser etching; pulsed ultra-violet laser etching; surface relief gratings; two-step process; wet etching; x-cut crystallographic orientations; z-cut crystallographic orientations;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:20001262
