DocumentCode
1399646
Title
Fabrication of surface relief gratings on lithium niobate by combined UV laser and wet etching
Author
Mailis, S. ; Ross, G.W. ; Reekie, L. ; Abernethy, J.A. ; Eason, R.W.
Author_Institution
Optoelectron. Res. Centre, Southampton Univ., UK
Volume
36
Issue
21
fYear
2000
fDate
10/12/2000 12:00:00 AM
Firstpage
1801
Lastpage
1803
Abstract
Surface relief gratings have been fabricated on pure and Ti indiffused lithium niobate samples of x-cut and z-cut crystallographic orientations by a simple two-step process, which combines optical (pulsed ultra-violet laser) and chemical etching
Keywords
diffraction gratings; etching; laser beam etching; lithium compounds; optical fabrication; optical materials; optical waveguides; titanium; LiNbO3; LiNbO3:Ti; Ti indiffused LiNbO3 samples; UV laser etching; chemical etching; combined UV laser/wet etching; fabrication; optical laser etching; pulsed ultra-violet laser etching; surface relief gratings; two-step process; wet etching; x-cut crystallographic orientations; z-cut crystallographic orientations;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:20001262
Filename
878645
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