Title :
Electrophoretically deposited zinc oxide thick film gas sensor
Author :
Hossein-Babaei, F. ; Taghibakhsh, F.
Author_Institution :
Canadian High Temp. Res. Ltd., Vancouver, BC, Canada
fDate :
10/12/2000 12:00:00 AM
Abstract :
Fabrication of a ZnO gas sensor by electrophoretic deposition (EPD) is reported. EPD of submicron sized ZnO powder on an aluminium-chromium-iron alloy substrate was carried out in pure acetone. The porous thick film obtained was sintered at 1000°C in air. A native aluminium oxide layer grown on the alloy substrate insulated the sintered ZnO layer from the metal substrate. Operated at 250°C, the device showed a 20% conductance change in the presence of 10 ppm wood smoke
Keywords :
II-VI semiconductors; electrical conductivity; electrophoretic coating techniques; gas sensors; porous materials; powder technology; sintering; wide band gap semiconductors; zinc compounds; 1000 C; 250 C; AlCrFe; ZnO; ZnO gas sensor; acetone; alloy substrate; aluminium-chromium-iron alloy substrate; conductance change; electrophoretic deposition; electrophoretically deposited zinc oxide thick film gas sensor; fabrication; native aluminium oxide layer; porous thick film; sintered ZnO layer; sintering; submicron sized ZnO powder; wood smoke;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:20001258
