DocumentCode
1399918
Title
A high-power long pulse excimer laser
Author
McKee, Terrence J. ; Boyd, Gary ; Znotins, Thomas A.
Author_Institution
Lumonics Inc., Kanata, Ont., Canada
Volume
1
Issue
3
fYear
1989
fDate
3/1/1989 12:00:00 AM
Firstpage
59
Lastpage
61
Abstract
Excimer lasers operating at high average powers are becoming important for materials-processing applications. A long-pulse excimer laser with automatic spark preionization which provides a pulse energy of 1 J with an optical pulse length of 200 ns full-width half-maximum for XeCl is described. Successful scaling of the repetition rate to 220 p.p.s. is discussed along with requirements for gas flow.<>
Keywords
excimer lasers; xenon compounds; 1 J; 200 ns; XeCl; automatic spark preionization; gas flow; high-power long pulse excimer laser; repetition rate; Electrodes; Fault location; Gas lasers; Laser excitation; Optical pulses; Power lasers; Pulse circuits; Sparks; Switches; Thyratrons;
fLanguage
English
Journal_Title
Photonics Technology Letters, IEEE
Publisher
ieee
ISSN
1041-1135
Type
jour
DOI
10.1109/68.87896
Filename
87896
Link To Document