Title :
A high-power long pulse excimer laser
Author :
McKee, Terrence J. ; Boyd, Gary ; Znotins, Thomas A.
Author_Institution :
Lumonics Inc., Kanata, Ont., Canada
fDate :
3/1/1989 12:00:00 AM
Abstract :
Excimer lasers operating at high average powers are becoming important for materials-processing applications. A long-pulse excimer laser with automatic spark preionization which provides a pulse energy of 1 J with an optical pulse length of 200 ns full-width half-maximum for XeCl is described. Successful scaling of the repetition rate to 220 p.p.s. is discussed along with requirements for gas flow.<>
Keywords :
excimer lasers; xenon compounds; 1 J; 200 ns; XeCl; automatic spark preionization; gas flow; high-power long pulse excimer laser; repetition rate; Electrodes; Fault location; Gas lasers; Laser excitation; Optical pulses; Power lasers; Pulse circuits; Sparks; Switches; Thyratrons;
Journal_Title :
Photonics Technology Letters, IEEE
