Title :
GaAs/GaAlAs graded refractive-index embedded core optical waveguides by OMCVD
Author :
Yi-Yan, A. ; Colas, E. ; Bhat, R. ; Seto, M. ; Deri, R.J. ; Carru, H.
Author_Institution :
Bellcore, Red Bank, NJ, USA
fDate :
4/1/1989 12:00:00 AM
Abstract :
A description is given of graded refractive-index embedded core optical (GRECO) waveguides produced in GaAs/GaAlAs by sequential introduction of varying numbers of superlattice periods during metallorganic chemical vapor deposition (MOVCD) growth of the GaAs core material on patterned substrates. This technique offers the possibility of synthesizing the vertical index profile of the core and provides a built-in index difference for lateral confinement of guided modes. Fully planarized embedded waveguides fabricated with propagation losses of 1.5 dB/cm at a wavelength of 1.523 mu m are reported; their field distribution was analyzed using a finite-element technique.<>
Keywords :
III-V semiconductors; aluminium compounds; chemical vapour deposition; gallium arsenide; gradient index optics; optical waveguides; optical workshop techniques; semiconductor growth; semiconductor superlattices; 1.5 dB; 1.523 micron; GaAs-GaAlAs; MOCVD; built-in index difference; core material; field distribution; finite-element technique; graded refractive-index embedded core optical waveguides; guided modes; lateral confinement; metallorganic chemical vapor deposition; patterned substrates; propagation losses; semiconductor; sequential introduction; superlattice periods; vertical index profile; Chemical vapor deposition; Gallium arsenide; Inorganic materials; Metallic superlattices; Optical materials; Optical refraction; Optical superlattices; Optical waveguides; Planar waveguides; Propagation losses;
Journal_Title :
Photonics Technology Letters, IEEE
