• DocumentCode
    1400120
  • Title

    How to model and simulate microgyroscope systems

  • Author

    Teegarde, Darrell ; Lorenz, Gunar ; Neuf, R.

  • Author_Institution
    Analogy Inc., Beaverton, OR, USA
  • Volume
    35
  • Issue
    7
  • fYear
    1998
  • fDate
    7/1/1998 12:00:00 AM
  • Firstpage
    66
  • Lastpage
    75
  • Abstract
    An accurate physical model of a micro-electromechanical system can save valuable design time and slash the number of foundry runs needed for characterization. Using a set of existing simulators and field solvers, the authors developed a method for modeling the mechanical and electrical properties of their microgyroscope
  • Keywords
    digital simulation; electronic engineering computing; gyroscopes; micromechanical devices; electrical properties; field solvers; mechanical properties; micro-electromechanical system; microgyroscope systems; physical model; simulators; Analytical models; Circuit simulation; Conducting materials; Etching; Finite element methods; Gyroscopes; Manufacturing processes; Micromechanical devices; Microsensors; Silicon;
  • fLanguage
    English
  • Journal_Title
    Spectrum, IEEE
  • Publisher
    ieee
  • ISSN
    0018-9235
  • Type

    jour

  • DOI
    10.1109/6.694362
  • Filename
    694362
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1400120