Title :
How to model and simulate microgyroscope systems
Author :
Teegarde, Darrell ; Lorenz, Gunar ; Neuf, R.
Author_Institution :
Analogy Inc., Beaverton, OR, USA
fDate :
7/1/1998 12:00:00 AM
Abstract :
An accurate physical model of a micro-electromechanical system can save valuable design time and slash the number of foundry runs needed for characterization. Using a set of existing simulators and field solvers, the authors developed a method for modeling the mechanical and electrical properties of their microgyroscope
Keywords :
digital simulation; electronic engineering computing; gyroscopes; micromechanical devices; electrical properties; field solvers; mechanical properties; micro-electromechanical system; microgyroscope systems; physical model; simulators; Analytical models; Circuit simulation; Conducting materials; Etching; Finite element methods; Gyroscopes; Manufacturing processes; Micromechanical devices; Microsensors; Silicon;
Journal_Title :
Spectrum, IEEE
