A Compact Variable-Temperature Broadband Series-Resistor Calibration

We present a broadband on-wafer calibration from 45 MHz to 40 GHz for variable temperature measurements, which requires three standards: a thru, reflect, and series resistor. At room temperature, the maximum error of this technique, compared to a benchmark nine-standard multiline thru-reflect-line (TRL) method, is comparable to the repeatability of the benchmark calibration. The series-resistor standard is modeled as a lumped-element -network, which is described by four frequency-independent parameters. We show that the model is stable over three weeks, and compare the calibration to the multiline TRL method as a function of time. The approach is then demonstrated at variable temperature, where the model parameters are extracted at 300 K and at variable temperatures down to 20 K, in order to determine their temperature dependence. The resulting technique, valid over the temperature range from 300 to 20 K, reduced the total footprint of the calibration standards by a factor of 17 and the measurement time by a factor of 3.