Title :
Variable RF MEMS fluidic inductor incorporating lamination process
Author :
El Gmati, I. ; Calmon, Pierre ; Fulcrand, R. ; Pons, P. ; Boukabache, A. ; Boussetta, Hela ; Kallala, M.A. ; Besbes, Khaoula
Author_Institution :
LAAS, Univ. de Toulouse, Toulouse, France
fDate :
12/1/2010 12:00:00 AM
Abstract :
A variable inductor based on liquid tuning has been fabricated and characterised. The fabrication process used SU-8 channel obtained by spin coating and lamination. A 107% tuning range with high inductance from 5.4 to 2.6 nH is achieved. With no actuation, the peak quality factor is 12, and the self-resonance frequency is 4 GHz.
Keywords :
Q-factor; inductors; microfluidics; polymer films; radiofrequency integrated circuits; spin coating; MEMS tunable fluidic inductor; SU8 channel; electric inductance; frequency 4 GHz; lamination; lamination process; liquid tuning; propylene glycol methyl ether acetate; quality factor; radiofrequency microelectromechanical system; self-resonance frequency; spin coating;
Journal_Title :
Micro & Nano Letters, IET
DOI :
10.1049/mnl.2010.0131
