• DocumentCode
    1402393
  • Title

    2008 Best Paper Award

  • Author

    Boning, Duane S.

  • Volume
    23
  • Issue
    1
  • fYear
    2010
  • Firstpage
    1
  • Lastpage
    1
  • Abstract
    The IEEE Transactions on Semiconductor Manufacturing Best Paper Award is presented to Allan Gu and Avideh Zakhor, for the paper entitled "Optical Proximity Correction with Linear Regression," published on the May 2008 Transactions.
  • Keywords
    Awards;
  • fLanguage
    English
  • Journal_Title
    Semiconductor Manufacturing, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0894-6507
  • Type

    jour

  • DOI
    10.1109/TSM.2009.2039271
  • Filename
    5405109
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1402393