DocumentCode :
1402393
Title :
2008 Best Paper Award
Author :
Boning, Duane S.
Volume :
23
Issue :
1
fYear :
2010
Firstpage :
1
Lastpage :
1
Abstract :
The IEEE Transactions on Semiconductor Manufacturing Best Paper Award is presented to Allan Gu and Avideh Zakhor, for the paper entitled "Optical Proximity Correction with Linear Regression," published on the May 2008 Transactions.
Keywords :
Awards;
fLanguage :
English
Journal_Title :
Semiconductor Manufacturing, IEEE Transactions on
Publisher :
ieee
ISSN :
0894-6507
Type :
jour
DOI :
10.1109/TSM.2009.2039271
Filename :
5405109
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1402393
