Fault simulation and modelling of microelectromechanical systems

High-reliability and safety-critical markets for microelectromechanical systems are driving new proposals for the integration of efficient built-in test and monitoring functions. The realisation of this technology will require support tools and validation methodologies including fault simulation and testability analysis and full closed-loop simulation techniques to ensure cost and quality targets. This article proposes methods to extend the capabilities of mixed signal and analogue integrated circuit fault simulation techniques to MEMS by including failure mode and effect analysis data and using behavioural modelling techniques compatible with electrical simulators.