Title :
MEMS-Controlled Paper-Like Transmissive Flexible Display
Author :
Lo, Cheng-Yao ; Huttunen, Olli-Heikki ; Hiitola-Keinänen, Johanna ; Petäjä, Jarno ; Fujita, Hiroyuki ; Toshiyoshi, Hiroshi
Author_Institution :
Inst. of NanoEngineering & Microsyst., Nat. Tsing Hua Univ., Hsinchu, Taiwan
fDate :
4/1/2010 12:00:00 AM
Abstract :
A novel microelectromechanical-systems (MEMS)-controlled paper-like transmissive flexible display device was modeled by a combination of a cantilever with a flat plate and was realized by roll-to-roll printing process for the first time. This model provides predictions as well as improvement suggestions to both mechanical and electrical designs. A newly developed roll-to-roll printing process which was composed of flexography, gravure, lift-off, and lamination techniques used to manufacture this device was proved applicable on flexible electronics with high-volume, low-cost, and large-area solutions. This 20 V-driven device provided distinguishable three primary colors with averaged transmittance of 50% in visible region for full color flexible display applications and showed commercialization compatibility. Its electrical, mechanical, and optical characteristics excelled previous similar works. The proved major advantages of mechanical reliability, low operation voltage, and process simplicity done by this work made the MEMS flexible display an important alternative to electrophoretic, electrowetting, and electrochromic systems.
Keywords :
electronic paper; flexible displays; micromechanical devices; MEMS flexible display; cantilever; electrochromic systems; electrophoretic systems; electrowetting systems; flat plate; flexible electronics; flexography; full color flexible display applications; gravure; lamination techniques; mechanical reliability; microelectromechanical systems; paper-like transmissive flexible display device; roll-to-roll printing process; Electronic paper; Fabry–Perot; interferometer; microelectromechanical systems (MEMS); roll-to-roll;
Journal_Title :
Microelectromechanical Systems, Journal of
DOI :
10.1109/JMEMS.2009.2038287