DocumentCode
1404319
Title
Analytic model of parasitic capacitance attenuation in CMOS devices with hyperthin oxides
Author
Ahmed, K. ; Ibok, E. ; Hauser, J.
Author_Institution
Conexant Syst. Inc., Newport Beach, CA, USA
Volume
36
Issue
20
fYear
2000
fDate
9/28/2000 12:00:00 AM
Firstpage
1699
Lastpage
1700
Abstract
The parasitic accumulation capacitance attenuation in MOS structures with hyper-thin oxides has been modelled using a distributed RC network. The simple analytic model is in excellent agreement with a two-dimensional numerical simulation and experimental data
Keywords
MOS capacitors; CMOS devices; analytic model; distributed RC network; hyperthin oxides; parasitic capacitance attenuation; two-dimensional numerical simulation;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:20001160
Filename
882010
Link To Document