Micromachined inertial sensors

Author

Yazdi, Navid ; Ayazi, Farrokh ; Najafi, Khalil

Author_Institution

Dept. of Electr. Eng. & Comput. Sci., Michigan Univ., Ann Arbor, MI, USA

Volume

86

Issue

8

fYear

1998

fDate

8/1/1998 12:00:00 AM

Firstpage

1640

Lastpage

1659

Abstract

This paper presents a review of silicon micromachined accelerometers and gyroscopes. Following a brief introduction to their operating principles and specifications, various device structures, fabrication, technologies, device designs, packaging, and interface electronics issues, along with the present status in the commercialization of micromachined inertial sensors, are discussed. Inertial sensors have seen a steady improvement in their performance, and today, microaccelerometers can resolve accelerations in the micro-g range, while the performance of gyroscopes has improved by a factor of 10× every two years during the past eight years. This impressive drive to higher performance, lower cost, greater functionality, higher levels of integration, and higher volume will continue as new fabrication, circuit, and packaging techniques are developed to meet the ever increasing demand for inertial sensors

Keywords

accelerometers; elemental semiconductors; gyroscopes; inertial systems; micromachining; microsensors; silicon; Si; accelerometer; device design; fabrication; gyroscope; interface electronics; packaging; silicon micromachined inertial sensor; Accelerometers; Application software; Circuits; Consumer electronics; Costs; Fabrication; Gyroscopes; Micromachining; Packaging; Silicon;

fLanguage

English

Journal_Title

Proceedings of the IEEE

Publisher

ieee

ISSN

0018-9219

Type

jour

DOI

10.1109/5.704269

Filename

704269