Microactuators and micromachines

Author

Fujita, Hiroyuki

Author_Institution

Inst. of Ind. Sci., Tokyo Univ., Japan

Volume

86

Issue

8

fYear

1998

fDate

8/1/1998 12:00:00 AM

Firstpage

1721

Lastpage

1732

Abstract

Research and development in microelectromechanical systems (MEMS) have made remarkable progress since 1988, when an electrostatic micromotor the size of a human hair was first operated successfully. Since then, many types of microactuators utilizing various driving forces and mechanisms have been developed. Distinctive features of MEMS (miniaturization, multiplicity of components, and the integration of microelectronics) have led to promising application areas such as fluidic microsystems. In the future, MEMS promises to make contributions to the society of the twenty-first century in three broad areas: (1) offering easier access to information, (2) making human lifestyles more compatible with the environment, and (3) improving people´s social welfare. This paper will discuss some of the technological issues pertaining to microactuators, micromachines, and the future development of MEMS

Keywords

microactuators; micromechanical devices; small electric machines; technological forecasting; MEMS technology; microactuators; microelectromechanical systems; micromachines; Electrostatics; Fluidic microsystems; Hair; Humans; Microactuators; Microelectromechanical systems; Microelectronics; Micromechanical devices; Micromotors; Research and development;

fLanguage

English

Journal_Title

Proceedings of the IEEE

Publisher

ieee

ISSN

0018-9219

Type

jour

DOI

10.1109/5.704278

Filename

704278