Title :
Fabrication of short GaAs wet-etched mirror lasers and their complex spectral behavior
Author :
Karouta, Fouad ; Smalbrugge, E. ; van der Vleuten, W.C. ; Gaillard, S. ; Acke, Gerard A.
Author_Institution :
Dept. of Electr. Eng., Eindhoven Univ. of Technol., Netherlands
fDate :
8/1/1998 12:00:00 AM
Abstract :
A versatile fabrication technique for GaAs-AlGaAs wet-etched mirror lasers is presented. This technique works independently of the Al concentration in the cladding layers up to a value of 70%, and it requires four photolithography steps. Ridge waveguide lasers have been successfully processed using a double heterostructure (DHS) as well as graded index separate confinement heterostructures (GRINSCH) having different quantum-well (QW) active layers. This technique is used to fabricate short-cavity lasers in GRINSCH structures having GaAs multiple-quantum-well (MQW) or bulk active layers. Laser operation was obtained in a 29-μm-long device using a 5-QW structure. Short lasers with QW active layers show a complex spectral behavior. These lasers operate at higher current densities (~20 kA/cm2) and emit light at more than one wavelength. This implies that higher order transitions are involved which is not the case when using a bulk GaAs active layer. Besides the two peaks corresponding to the n=1 and n=2 transitions, we found an intermediate peak which corresponds presumably to the forbidden transition E1-HH2
Keywords :
III-V semiconductors; aluminium compounds; etching; gallium arsenide; laser cavity resonators; laser mirrors; laser transitions; optical fabrication; photolithography; quantum well lasers; 29 mum; Al concentration; GRINSCH; GaAs-AlGaAs; GaAs-AlGaAs wet-etched mirror lasers; QW active layers; QW lasers; bulk GaAs active layer; bulk active layers; cladding layers; complex spectral behavior; double heterostructure; forbidden transition E1-HH2; graded index separate confinement heterostructures; higher current densities; higher order transitions; laser transitions; photolithography steps; quantum-well active layers; ridge waveguide lasers; short GaAs wet-etched mirror laser fabrication; versatile fabrication technique; Chemical lasers; Etching; Gallium arsenide; Laser modes; Laser transitions; Mirrors; Optical device fabrication; Quantum well lasers; Semiconductor lasers; Waveguide lasers;
Journal_Title :
Quantum Electronics, IEEE Journal of