Title :
A physical model for the correlation between holding voltage and holding current in epitaxial CMOS latch-up
Author :
Chen, Ming-Jer ; Lee, Hun-Shung ; Chen, Jyh-Huei ; Hou, Chin-Shan ; Lin, Chaun-Sheng ; Jou, Yeh-Ning
Author_Institution :
Dept. of Electron. Eng., Nat. Chiao Tung Univ., Hsinchu, Taiwan
Abstract :
A new physical model concerning the holding points for latch-up in epitaxial CMOS structures is established by combining the lateral p-i-n high level injection and the vertical BJT base push-out formula. The model matches adequately the correlation between holding voltage and holding current extensively measured from different combinations of temperatures, epitaxial layer thicknesses, and anode-to-cathode spacings. This is also the case for the two-dimensional device simulations. A quantitative analysis based on the model consistently judges the crucial role of the vertical BJT base push-out width in producing the observed correlation. The potential merits of the model in extended applications are outlined.
Keywords :
CMOS integrated circuits; integrated circuit modelling; semiconductor epitaxial layers; epitaxial CMOS latch-up; holding current; holding voltage; lateral p-i-n high level injection; physical model; two-dimensional device simulation; vertical BJT base push-out; CMOS process; Charge carrier density; Current measurement; Epitaxial layers; Scattering; Semiconductor device modeling; Semiconductor process modeling; Temperature; Thickness measurement; Voltage;
Journal_Title :
Electron Device Letters, IEEE