DocumentCode :
1407631
Title :
A physical model for the correlation between holding voltage and holding current in epitaxial CMOS latch-up
Author :
Chen, Ming-Jer ; Lee, Hun-Shung ; Chen, Jyh-Huei ; Hou, Chin-Shan ; Lin, Chaun-Sheng ; Jou, Yeh-Ning
Author_Institution :
Dept. of Electron. Eng., Nat. Chiao Tung Univ., Hsinchu, Taiwan
Volume :
19
Issue :
8
fYear :
1998
Firstpage :
276
Lastpage :
278
Abstract :
A new physical model concerning the holding points for latch-up in epitaxial CMOS structures is established by combining the lateral p-i-n high level injection and the vertical BJT base push-out formula. The model matches adequately the correlation between holding voltage and holding current extensively measured from different combinations of temperatures, epitaxial layer thicknesses, and anode-to-cathode spacings. This is also the case for the two-dimensional device simulations. A quantitative analysis based on the model consistently judges the crucial role of the vertical BJT base push-out width in producing the observed correlation. The potential merits of the model in extended applications are outlined.
Keywords :
CMOS integrated circuits; integrated circuit modelling; semiconductor epitaxial layers; epitaxial CMOS latch-up; holding current; holding voltage; lateral p-i-n high level injection; physical model; two-dimensional device simulation; vertical BJT base push-out; CMOS process; Charge carrier density; Current measurement; Epitaxial layers; Scattering; Semiconductor device modeling; Semiconductor process modeling; Temperature; Thickness measurement; Voltage;
fLanguage :
English
Journal_Title :
Electron Device Letters, IEEE
Publisher :
ieee
ISSN :
0741-3106
Type :
jour
DOI :
10.1109/55.704398
Filename :
704398
Link To Document :
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