Title :
Proceedings of 1990 IEEE 3rd International Conference on Vacuum Micro-electronics
fDate :
10/1/1991 12:00:00 AM
Abstract :
The following topics were dealt with: vacuum microelectronic device fabrication; field emission, cold cathode emission properties; field emitter arrays; emission noise theory high-vacuum test station; miniaturised liquid metal ion source; lateral field emitter microtriodes; oxidation; sharpened emitter array process; miniature electron-optical columns; display applications
Keywords :
cathodes; electron field emission; semiconductor technology; vacuum microelectronics; vacuum tubes; cold cathode; display applications; emission noise theory; fabrication; field emission; field emitter arrays; high-vacuum test station; integrated vacuum valves; microtriodes; miniature electron-optical columns; miniaturised liquid metal ion source; oxidation sharpening; vacuum microelectronic device;
Journal_Title :
Electron Devices, IEEE Transactions on
