Title :
Vacuum microelectronics: what´s new and exciting
Author_Institution :
Canon Res. Center, Atsugi, Japan
fDate :
10/1/1991 12:00:00 AM
Abstract :
It is argued that the key factor required to make vacuum microelectronics successful is closely related to an understanding and control of the physics, materials and microfabrication technology for field emitter arrays (FEAs). The topics discussed are the optimization and theoretical limit of the FEA; thermal stability of the FEA and the mesoscopic FEA; fabrication and materials of FEAs; and characteristics of FEAs. The author examines basic characteristics, limits and capabilities of FEAs from the viewpoint of optimizing the concept of the most current for the least voltage
Keywords :
cathodes; electron field emission; stability; vacuum microelectronics; fabrication; field emitter arrays; materials; microfabrication technology; thermal stability; vacuum microelectronics; Electric breakdown; Electrodes; Electrons; Fabrication; Geometry; Microelectronics; Microscopy; Surface cleaning; Vacuum breakdown; Vacuum technology;
Journal_Title :
Electron Devices, IEEE Transactions on
