A study of field emission microtriodes

Author

Holland, C.E. ; Rosengreen, A. ; Spindt, C.A.

Author_Institution

SRI Int., Menlo Park, CA, USA

Volume

38

Issue

10

fYear

1991

fDate

10/1/1991 12:00:00 AM

Firstpage

2368

Lastpage

2372

Abstract

Structures simulating integrated field emission microtriodes have been successfully fabricated and tested. These microtriodes use Spindt-type molybdenum field emission cathodes with the anodes in three different configurations. The anodes are located at a distance d>5 mm, ~1.25 mm, and ~2-20 μm from the gate electrode and the emitter tip. The effects of device operation on the performance of the Mo field emission tips operating in close proximity to anodes were presented. A transconductance of 0.5 mS (5 μS/tip or 12 S/cm²) and a cutoff frequency of 0.8 MHz have been measured. Extension of these results indicates that transconductances of 250 mS/mm and cutoff frequencies of 100 GHz may be possible

Keywords

cathodes; electron field emission; molybdenum; triodes; vacuum microelectronics; 0.8 MHz; 1.25 mm; 2 to 20 micron; 5 mm; 5 muS; Mo field emission tips; Spindt type field emission cathodes; anodes; close proximity; configurations; cutoff frequency; effects of device operation; emitter tip; field emission microtriodes; gate electrode; performance; transconductance; Anodes; Capacitance; Cathodes; Cutoff frequency; Electrodes; Electron beams; Electron tubes; Frequency measurement; Testing; Transconductance;

fLanguage

English

Journal_Title

Electron Devices, IEEE Transactions on

Publisher

ieee

ISSN

0018-9383

Type

jour

DOI

10.1109/16.88527

Filename

88527