A Range Image Sensor Based on 10- $\mu{\hbox {m}}$ Lock-In Pixels in 0.18- $\mu$ m CMOS Imaging Tec

This paper presents the design and characterization of a lock-in pixel array based on a buried channel photo-detector aimed at time-of-flight range imaging. The proposed photo-demodulator has been integrated in a 10-μm pixel pitch with a fill factor of 24%, and is capable of a maximum demodulation frequency of 50 MHz with a contrast of 29.5%. The sensor has been fabricated in a 0.18-μm CMOS imaging technology and assembled in a range camera system setup. The system provides a stream of three-dimensional images at 5-20 fps on a 3-6 m range, with a linearity error lower than 0.7% and a repeatability of 5-16 cm, while the best achievable precision is 2.7 cm at a 50-MHz modulation frequency.