• DocumentCode
    1411238
  • Title

    An extremely fine line

  • Author

    Palmer, Katie M.

  • Volume
    49
  • Issue
    1
  • fYear
    2012
  • fDate
    1/1/2012 12:00:00 AM
  • Firstpage
    47
  • Lastpage
    50
  • Abstract
    Moore´s Law needs a hero. This year, we´ll see if the chip business´s designated savior-extreme ultraviolet (EUV) lithography- is really up to the task. After decades of bringing us the incredible shrinking transistor, chipmakers are now hard up against the limits of their printing technique: Trying to use today´s ultraviolet lasers to print the next generation of circuits would be like trying to trace a fine line with a preschooler´s crayon.
  • Keywords
    transistors; ultraviolet lithography; Moore´s Law; chip business; chipmakers; extreme ultraviolet lithography; printing technique; shrinking transistor; Lithography; Moore´s Law; Photonics; Ultraviolet sources;
  • fLanguage
    English
  • Journal_Title
    Spectrum, IEEE
  • Publisher
    ieee
  • ISSN
    0018-9235
  • Type

    jour

  • DOI
    10.1109/MSPEC.2012.6117838
  • Filename
    6117838
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1411238